Links and References

Links

• Matlab GUI.

• Visit the YAML website for more informations.

• Visit the YAML code for Matlab.

Other interesting Matlab toolboxes about indentation

• STABiX / STABiX Documentation

• PopIn / PopIn Documentation

• TriDiMap / TriDiMap Documentation

Links about (nano)indentation

• SF2M - Groupe Indentation.

• Matlab Li’s code to determine elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation.

• ISO 14577 - 1 , “Metallic materials – Instrumented indentation test for hardness and materials parameters – Part 1: Test method”, (2002).

• ISO 14577 - 2 , “Metallic materials – Instrumented indentation test for hardness and materials parameters – Part 2: Verification and calibration of testing machines”, (2002).

• ISO 14577 - 3 , “Metallic materials – Instrumented indentation test for hardness and materials parameters – Part 3: Calibration of reference blocks”, (2002).

• ISO 14577 - 4 , “Metallic materials – Instrumented indentation test for hardness and materials parameters – Part 4: Test method for metallic and non-metallic coatings”, (2007).

References

• Mercier D. et al., “Young’s modulus measurement of a thin film from experimental nanoindentation performed on multilayer systems” (2010).

• Mercier D., “Behaviour laws of materials used in electrical contacts for « flip chip » technologies.”, PhD thesis (2013)

• Mercier D., “Behaviour laws of materials used in electrical contacts for « flip chip » technologies.” PhD defense (2013).

• Mercier D. et al., “Investigation of the fracture of very thin amorphous alumina film during spherical nanoindentation” (2017).

(Nano)Indentation models (conical indenters)

• Love A.E.H., “Boussinesq’s problem for a rigid cone.” (1939).

• Galin L.A., “Spatial contact problems of the theory of elasticity for punches of circular shape in planar projection.”, J. Appl. Math. Mech. (PMM) (1946), 10, pp. 425-448.

• Bulychev S.I. et al., “Determining Young’s modulus from the indentor penetration diagram.”, Zavod. Lab., 1973, 39, pp. 1137-1142.

• Shorshorov M.K. et al., Sov. Phys. Dokl., 1982, 26.

• Loubet J.L. et al., “Vickers Indentation Curves of Magnesium Oxide (MgO).” (1984).

• Doerner M.F. and Nix W.D., “A method for interpreting the data from depth-sensing indentation instruments” (1986).

• Loubet J.L. et al., “Vickers indentation curves of elastoplastic materials” (1986).

• Joslin D.L. and Oliver W.C., “A new method for analyzing data from continuous depth-sensing microindentation tests” (1990).

• Oliver W.C. and Pharr G.M., “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments” (1992).

• Pharr G.M. et al., “On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation” (1992).

• Loubet J.L. et al., “Nanoindentation with a surface force apparatus.” (1993).

• Lucas B.N. et al., “Time Dependent Deformation During Indentation Testing.” (1996).

• Hainsworth S.V. et al., “Analysis of nanoindentation load-displacement loading curves” (1996).

• Bec S. et al., “Improvements in the indentation method with a surface force apparatus” (1996).

• Menčík J. et al., “Determination of elastic modulus of thin layers using nanoindentation” (1997).

• Bolshakov A. and Pharr G. M., “Influences of pile-up on the measurement of mechanical properties by load and depth sensing indentation techniques.” (1998).

• Cheng Y.T. and Cheng C.M. ,”Effects of ‘sinking in’ and ‘piling up’ on estimating the contact area under load in indentation.” (1998).

• Cheng Y.T. and Cheng C.M. ,”Relationships between hardness, elastic modulus, and the work of indentation.” (1998).

• Hochstetter G. et al., “Strain-rate effects on hardness of glassy polymers in the nanoscale range. Comparison between quasi-static and continuous stiffness measurements” (1999).

• Malzbender J. and de With G., “Indentation load–displacement curve, plastic deformation, and energy.” (2002).

• Li X. and Bhushan B., “A review of nanoindentation continuous stiffness measurement technique and its applications.” (2002).

• Oliver W.C. and Pharr G.M., “Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology” (2004).

• Cheng Y.T. and Cheng C.M., “Scaling, dimensional analysis, and indentation measurements.” (2004).

• Fischer-Cripps A.C., “Critical review of analysis and interpretation of nanoindentation test data” (2006).

• Guillonneau G. et al.,”Extraction of mechanical properties with second harmonic detection for dynamic nanoindentation testing.” (2012).

• Guillonneau G. et al., “Determination of mechanical properties by nanoindentation independently of indentation depth measurement” (2012).

• Yetna N’jock M. et al., “A criterion to identify sinking-in and piling-up in indentation of materials.” (2015).

Correction factors and Correction of experimental data

• King R.B., “Elastic analysis of some punch problems for a layered medium” (1987).

• Menčík J., “Determination of elastic modulus of thin layers using nanoindentation” (1997).

• Hay J.C. et al., “A critical examination of the fundamental relations used in the analysis of nanoindentation data” (1999).

• Troyon M. and Lafaye S., “About the importance of introducing a correction factor in the Sneddon relationship for nanoindentation measurements” (2002).

• Strader J.H. et al., “An experimental evaluation of the constant b relating the contact stiffness to the contact area in nanoindentation.” (2006).

• Fischer-Cripps A.C., “Critical review of analysis and interpretation of nanoindentation test data” (2006).

• Kashani M.S. and Madhavan V., “The Effect of Surface Tilt on Nanoindentation Results” (2007).

• Jakes J.E. et al., “Experimental method to account for structural compliance in nanoindentation measurements” (2008).

• Pharr G.M. et al., “Critical issues in making small-depth mechanical property measurements by nanoindentation with continuous stiffness measurement” (2009).

• Kaufman J. D. and Klapperich C. M., “Surface detection errors cause overestimation of the modulus in nanoindentation on soft materials” (2009).

• Li H. et al., “New methods of analyzing indentation experiments on very thin films” (2010).

• Piccarolo S. et al., “Improving surface detection on nanoindentation of compliant materials” (2010).

• Jakes J.E. and Stauffer D., “Contact area correction for surface tilt in pyramidal nanoindentation” (2021).

Bilayer models to extract Young’s modulus of a thin film on a substrate (with conical indenters)

• Bückle H., “VDI Berichte” (1961).

• Doerner M.F. and Nix W.D.,”A method for interpreting the data from depth-sensing indentation instruments” (1986).

• Yu H.Y. et al., “The effect of substrate on the elastic properties of films determined by the indentation test - axisymmetric Boussinesq problem” (1990).

• Pharr G.M. and Oliver W.C., “Measurement of Thin Film Mechanical Properties Using Nanoindentation” (1992).

• Gao H. et al., “Elastic contact versus indentation modeling of multi-layered materials” (1992).

• Menčík J. et al., “Determination of elastic modulus of thin layers using nanoindentation” (1997).

• Chen X. and Vlassak J.J., “Numerical study on the measurement of thin film mechanical properties by means of nanoindentation” (2001).

• Rar A. et al., “Assessment of new relation for the elastic compliance of a film–substrate system.” (2002).

• Saha R. and Nix W.D., “Effects of the substrate on the determination of thin film mechanical properties by nanoindentation” (2002).

• Chen S. et al., “Nanoindentation of thin-film-substrate system: Determination of film hardness and Young’s modulus” (2004).

• Jung Y.-G. et al. “Evaluation of elastic modulus and hardness of thin films by nanoindentation” (2004).

• Perriot A. and Barthel E., “Elastic contact to a coated half-space: Effective elastic modulus and real penetration” (2004).

• Bec S. et al., “A simple guide to determine elastic properties of films on substrate from nanoindentation experiments” (2006).

• Xu H. and Pharr G.M., “An improved relation for the effective elastic compliance of a film/substrate system during indentation by a flat cylindrical punch.” (2006).

• Korsunsky A.M. and Constantinescu A., “The influence of indenter bluntness on the apparent contact stiffness of thin coatings” (2009).

• Li H. and Vlassak J.J., “Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation” (2009).

• Sakai M., “Substrate-affected indentation contact parameters of elastoplastic coating/substrate composites” (2009).

• Hay J. and Crawford B., “Measuring substrate-independent modulus of thin films” (2011).

• Bull S.J., “Mechanical response of atomic layer deposition alumina coatings on stiff and compliant substrates” (2011).

• Bull S.J., “A simple method for the assessment of the contact modulus for coated systems.” (2014).

• Li Y. et al., “Models for nanoindentation of compliant films on stiff substrates” (2015).

Multilayer models to extract Young’s moduli of thin films on a multilayer sample (with conical indenters)

• Pailler-Mattei C. et al., “In vivo measurements of the elastic mechanical properties of human skin by indentation tests” (2008).

• Mercier D. et al., “Young’s modulus measurement of a thin film from experimental nanoindentation performed on multilayer systems” (2010).

• Mercier D., “Lois de comportement des matériaux utilisés dans les contacts électriques pour application “ flip chip “” (2013).

• Constantinescu A. et al., “Symbolic and numerical solution of the axisymmetric indentation problem for a multilayered elastic coating” (2013).

• Puchi-Cabrera. E.S. et al., “A description of the composite elastic modulus of multilayer coated systems” (2015).

Bilayer models to extract hardness of a thin film on a substrate (with conical indenters)

• Bückle H., “VDI Berichte” (1961).

• Kao P.-W. and Byrne J. G., “Ion Implantation Effects on Fatigue and Surface Hardness” (1981).

• Jönsson B. and Hogmark S., “Hardness measurements of thin films” (1984).

• Doerner M.F. et al., “Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques” (1986).

• Burnett P.J. and Rickerby D.S., “The mechanical properties of wear-resistant coatings: I: Modelling of hardness behaviour.” (1987).

• Burnett P.J. and Rickerby D.S., “The mechanical properties of wear-resistant coatings: II: Experimental studies and interpretation of hardness.” (1987).

• Bhattacharya A.K. and Nix W.D., “Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates” (1988).

• Page T.F. et al., “Nanoindentation Characterisation of Coated Systems: P:S2 - A New Approach Using the Continuous Stiffness Technique” (1998).

• Fernandes J.V. et al., “A model for coated surface hardness” (2000).

• Han S.M. et al., “Combinatorial studies of mechanical properties of Ti–Al thin films using nanoindentation” (2005).

• Han S.M. et al., “Determining hardness of thin films in elastically mismatched film-on-substrate systems using nanoindentation” (2006).

• Veprek-Heijman M.G.J. and Veprek S., “The deformation of the substrate during indentation into superhard coatings: Bückle’s rule revised” (2016).

Multilayer models to extract hardness of thin films on a multilayer sample (with conical indenters)

• Engel P.A. et al., “Interpretation of superficial hardness for multilayer platings” (1992).

• Rahmoun K. et al., “A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films” (2009).

• Arrazat B. et al., “Nano indentation de couches dures ultra minces de ruthénium sur or” (2010).

Finite Element Modelling of conical indentation of thin film(s) on a substrate

• Charleux L., “Abapy Documentation”

• ABAQUS documentation

• Bhattacharya A.K. and Nix W.D., “Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates” (1988).

• Bhattacharya A.K. and Nix W.D., “Finite element analysis of cone indentation.” (1991).

• Madsen D.T. et al. “Finite Element Simulation of Indentation Behavior of thin Films.” (1991).

• Sun Y. et al., “Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation.” (1995).

• Bolshakov A. and Pharr G.M., “Influences of pile-up on the measurement of mechanical properties by load and depth sensing indentation techniques.” (1998)

• Lichinchi M. et al., “Simulation of Berkovich nanoindentation experiments on thin films using finite element method.” (1998).

• Chen X. and Vlassak J.J., “A Finite Element Study on the Nanoindentation of Thin Films.” (2000).

• Chen X. and Vlassak J.J., “Numerical study on the measurement of thin film mechanical properties by means of nanoindentation.” (2001).

• Bouzakis K.-D. et al., “Thin hard coatings stress–strain curve determination through a FEM supported evaluation of nanoindentation test results.”, (2001).

• Hubert N. et al. “Identification of elastic-plastic material parameters from pyramidal indentation of thin films.” (2002).

• Shan Z. and Sitaraman S.K., “Elastic–plastic characterization of thin films using nanoindentation technique.” (2003).

• He J.L. and Veprek S., “Finite element modeling of indentation into superhard coatings.” (2003).

• Xu Z.-H. and Rowcliffe D., “Finite element analysis of substrate effects on indentation behaviour of thin films.” (2004).

• Panich N. and Sun Y. “Effect of penetration depth on indentation response of soft coatings on hard substrates: a finite element analysis” (2004)

• Cai X. and Bangert H., “Hardness measurements of thin films-determining the critical ratio of depth to thickness using FEM.” (2005).

• Bressan J.D. et al., “Modeling of nanoindentation of bulk and thin film by finite element method.” (2005).

• Pelletier H. et al., “Characterization of mechanical properties of thin films using nanoindentation test.” (2006)

• Charleux L., “Micromécanique de l’essai d’indentation : expériences et simulations.”, PhD thesis, Institut National Polytechnique de Grenoble (2006).

• Xu H., “A Finite Element Study of the Contact Stiffness of Homogenous Materials and Thin Films.” PhD thesis - University of Tennessee - Knoxville (2007)

• Antunes J.M. et al., “On the determination of the Young’s modulus of thin films using indentation tests” (2007).

• Chen S.H. et al., “Small scale, grain size and substrate effects in nano-indentation experiment of film–substrate systems.” (2007).

• Huang X. and Pelegri A.A., “Finite element analysis on nanoindentation with friction contact at the film/substrate interface.” (2007).

• Kopernik M. and Pietrzyk M., “2d numerical simulation of elasto-plastic deformation of thin hard coating systems in deep nanoindentation test with sharp indenter.” (2007).

• Pelegri A.A. and Huang X., “Nanoindentation on soft film/hard substrate and hard film/soft substrate material systems with finite element analysis.” (2008).

• Wittler O. et al., “Mechanical characterisation of thin metal layers by modelling of the nanoindentation experiment.” (2008).

• Sakharova N.A. et al., “Comparison between Berkovich, Vickers and conical indentation tests: A three-dimensional numerical simulation study.” (2009).

• Rao C.S. and Reddy C.E., “Finite element modeling of nanoindentation to extract load-displacement characteristics of bulk materials and thin films.” (2009).

• Gonzalez M. et al., “Modeling the substrate effects on nanoindentation mechanical property measurement.” (2009).

• Chen C., “2-D Finite Element Modeling for Nanoindentation and Fracture Stress Analysis.”, PhD thesis - University of South Florida (2009).

• Moore S.W. et al., “Nanoindentation in elastoplastic materials: insights from numerical simulations.” (2010).

• Guo W., “On the influence of indenter tip geometry on the identification of material parameters in indentation testing.”, PhD thesis, University of Liège (2010).

• Wang J.S. et al., “Identification of elastic parameters of transversely isotropic thin films by combining nanoindentation and FEM analysis.” (2010).

• Jiang L.M. et al., “Elastic-plastic properties of thin film on elastic-plastic substrates characterized by nanoindentation test.” (2010).

• Miller D.C. et al., “Thermo-mechanical properties of alumina films created using the atomic layer deposition technique.” (2010).

• Dowhan L. et al., “Investigation of thin films by nanoindentation with doe and numerical methods.” (2011).

• Isselé H. et al., “Determination of the Young’s modulus of a TiN Thin Film by nanoindentation: analytical models and numerical FEM simulation.” (2012).

• Phiciato’s blog (2013)

• Karimpour M. et al., “An inverse method for extracting the mechanical properties of the constituent materials of a multilayer from nanoindentation data.” (2013).

• Fourcade T., “Études des propriétés mécaniques de matériaux métalliques en couches minces”, PhD thesis - Université de Toulouse (2013).

• Moćko W. et al., “Simulation of nanoindentation experiments of single-layer and double-layer thin films using finite element method.” (2014).

• Kibech S. et al., “Nanoindentation” (2014).

• Kopernik M. and Milenin A., “Numerical modeling of substrate effect on determination of elastic and plastic properties of TiN nanocoating in nanoindentation test.” (2014).

• Li Y. et al., “Models for nanoindentation of compliant films on stiff substrates” (2015).

• Moreau S. et al., “Application of Design of Computer Experiments (DoCE) method for the extraction of the elasto-plastic behavior law of ECD copper through nano-indentation tests” (2015).

• Gupta A. K. et al., “Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach” (2015).

• Veprek-Heijman M.G.J. and Veprek S., “The deformation of the substrate during indentation into superhard coatings: Bückle’s rule revised” (2016).

• Du Y. et al., “A novel tri-layer nanoindentation method to measure the mechanical properties of a porous brittle ultra-low-k dielectric thin film” (2017).

• Lofaj F. and Németh D., “The effects of tip sharpness and coating thickness on nanoindentation measurements in hard coatings on softer substrates by FEM” (2017).

• Chakroun N. et al., “A new inverse analysis method for identifying the elastic properties of thin films considering thickness and substrate effects simultaneously” (2017).

• Chakroun N. et al., “Measuring elastic properties of the constituent multilayer coatings for different modulation periods” (2018).

• Pöhl F., “Determination of unique plastic properties from sharp indentation” (2019).

• Lodh A., “Orientation-dependent solid solution strengthening in zirconium: a nanoindentation study” (2019).

• Xiao H., “Theoretical model for determining elastic modulus of ceramic materials by nanoindentation” (2021).

• Sivaram S. et al., “Qualitative Study on Pile-up Effect on Hardness Test by Nano-Indentation” (2021).

• Vajire S.L. et al., “Novel machine learning-based prediction approach for nanoindentation load-deformation in a thin film: Applications to electronic industries” (2022).

Softwares

• IndentAnalyser by ASMEC

• Elastica by ASMEC

• Softwares from SIOMEC

• Piuma dataviewer from Optics 11

• Punias

• Gwyddion

• Softwares from Nanovea

• Virtual nanoindenter

• Nanoindentation from Kibech S. et al.

Reviews / Overviews of nanoindentation technique

• Li X. and Bhushan B., “A review of nanoindentation continuous stiffness measurement technique and its applications.” (2002).

• VanLandingham M.R., “Review of Instrumented Indentation” (2003).

• Fischer-Cripps A.C., “Nanoindentation” Springer 3rd Ed. (2011).

• Oliver W.C. and Pharr G.M., “Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology” (2004).

• Fischer-Cripps A.C., “Critical review of analysis and interpretation of nanoindentation test data” (2006).

• Lucca D.A. et al., “Nanoindentation: Measuring methods and applications” (2012).

• Němeček J., “Nanoindentation in Material Science” (2012).

• Michailidis N. et al., “Nanoindentation” (2014).

Reviews / Overviews of nanoindentation technique applied to coatings

• Pharr G.M. and Oliver W.C., “Measurement of Thin Film Mechanical Properties Using Nanoindentation” (1992).

• Mencík J. et al., “Determination of elastic modulus of thin layers using nanoindentation” (1997).

• Nix W.D., “Elastic and plastic properties of thin films on substrates: nanoindentation techniques” (1997).

• Van Vliet K.J. and Gouldstone A., “Mechanical Properties of Thin Films Quantified Via Instrumented Indentation” (2001).

• Fischer-Cripps A.C., “Nanoindentation” Springer 3rd Ed. (2011).

• Šimůnková Š., “Mechanical properties of thin film–substrate systems” (2003).

• Bull S.J., “Nanoindentation of coatings” (2005).

Books

• Johnson K.L., “Contact Mechanics” (1987), ISBN - 9780521347969.

• Bhushan B., “Micro/Nanotribology and Its Applications” (1997).

• Fischer-Cripps A.C., “Introduction to Contact Mechanics” Springer 1st Ed. (2000).

• Fischer-Cripps A.C., “Nanoindentation” Springer 1st Ed. (2002).

• Fischer-Cripps A.C., “Nanoindentation” Springer 2nd Ed. (2004).

• Fischer-Cripps A.C., “Introduction to Contact Mechanics” Springer 2nd Ed. (2007).

• Feng Z.-Q. et al., “Theory of nanoindentation” Handbook of Nanophysics - Chapter 26 (2010).

• Fischer-Cripps A.C., “Nanoindentation” Springer 3rd Ed. (2011).

• Tiwari A., “Nanomechanical Analysis of High Performance Materials” Springer Vol. 203 (2014).

• Tiwari A. and Natarajan S., “Applied Nanoindentation in Advanced Materials” Wiley (2017).